Profiler technologies
Light sources
460nm
580nm
Profiler dimensions
Objective lenses
| MAG | 5X | 10X | 20X | 50X | 100X |
| NA | 0.15 | 0.30 | 0.45 | 0.80 | 0.90 |
| WD (mm) | 20 | 15.8 | 3.0 | 1.0 | 2.0 |
| FOV1 (µm) | 2820 x 2820 | 1410 x 1410 | 700 x 700 | 280 x 280 | 141 x 141 |
| Spatial sampling2 (µm) | 2.76 | 1.38 | 0.69 | 0.27 | 0.13 |
| Optical resolution3 (µm) | 1.11 | 0.55 | 0.37 | 0.21 | 0.15 |
Confocal / Ai Focus Variation
| Measurement noise4 (nm) | 120 | 45 | 10 | 4 | 3 |
| Maximum slope5 (º) | 9 | 17 | 27 | 53 | 64 |
| MAG | 5X | 10X | 20X | 50X | 100X |
| System noise4 (nm) | 120 | 45 | 10 | 4 | 3 |
| Maximum slope5 (º) | 9 | 17 | 27 | 53 | 64 |
1 Maximum field of view with 2/3” camera and 0.25X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED. 4 Measurement noise is measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X |
| NA | 0.075 | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 |
| WD (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
| FOV1 (µm) | 5650 x 5650 | 2820 x 2820 | 1410 x 1410 | 700 x 700 | 280 x 280 | 140 x 140 |
| Spatial sampling2 (µm) | 5.52 | 2.76 | 1.38 | 0.69 | 0.27 | 0.07 |
| Optical resolution3 (µm) | 2.32 | 1.34 | 0.58 | 0.44 | 0.32 | 0.25 |
CSI
| Measurement noise4 (nm) | <5 nm | |||||
| Maximum slope5 (º) | 4 | 7 | 17 | 24 | 33 | 44 |
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X |
| Measurement noise4 (nm) | <5 nm | |||||
| Maximum slope5 (º) | 4 | 7 | 17 | 24 | 33 | 44 |
1 Maximum field of view with 2/3” camera and 0.25X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. 4 Measurement noise is measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.
Accuracy and repeatability
| Standard | Value | Uncertainty (U) | Repeatability (σ) | Technique |
| Step height (H) | <10 µm | U= (0.005 + H/50) μm | <10 nm | Confocal, AiFV & CSI |
| >10 µm | U = (0.120 + H/120) μm | >10 nm | Confocal, AiFV & CSI | |
| Areal roughness (Sa) | 0.79 µm | 40 nm | 6 nm | Confocal, AiFV & CSI |
Values obtained in a VC-E vibration environment. Objective used
for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI 50X 0.55NA. Resolution 1024×1024
pixels. Extended uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level
of confidence 95%). σ according to 25 measures.
Computer & Operating system
| Computer requirements | Intel® Core™ i5/i7 Processor Ethernet connectivity, minimum 1920 x 1080 display resolution |
| Operating System | Microsoft Windows 10 or higher |
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