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In-situ-Metrologie zur Überwachung der Poliertuch-Oberfläche bei der CMP

Case study, CMP, Unterhaltungselektronik

Der Bedarf nach der Vermessung der Oberfläche liegt im Rahmen des CMP-Verfahrens auf der Hand, immerhin ist die mechanische Interaktion zwischen den Oberflächen bei allen Prozessschritten eine [...]

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